1 European Projects Found
Searched on 125080 European Projects
FINISHED
Investigation of Si wafer damage in manufacturing processes (SIDAM)
Start date: Jan 1, 2008, End date: Jun 30, 2011,
...valuation of risk of breakage during their processes. They will have a choice of access to off-line characterization of defects by XRDI at ANKA or an in-line wafer inspection tool commercialized by Bede plc. The knowledge and tools developed will contribute to maintaining Europe's leading position in semiconductor x-ray metrology.
Read Project
