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Reconfigurable Microsystem Based on Miniaturized and Nanostructured RF-MEMS (NANOCOM)
Start date: Feb 1, 2011, End date: Jan 1, 2014 PROJECT  FINISHED 

Future wireless systems will have to achieve self-reconfigurable operations for real time efficient optimization of their performances. RF-MEMS switches will allow to face this challenge and open the route towards reconfigurability of high power systems, but their reliability is still nowadays an issue. The aim of NANOCOM project is to develop a new approach for future generation of smart systems by introducing nanostructured materials capacitive MEMS to improve the reliability by one order of magnitude. NANOCOM aims to address the dielectric charging effect which limits the lifetime and to enhance the thermal performances of the device, increasing the power handling capability. The main objectives of NANOCOM are:1)explore new nanostructured materials to be used as dielectrics in RF-MEMS devices to achieve higher reliable devices by minimizing charging effects and improving thermal dissipation under high power. High-k dielectrics such as PZT with a fine control of the nanostructure and composites, aligned Carbon Nanotubes in a Si3N4 matrix and doped poly crystalline diamond as well as diamond nanopillars.2) develop the design methodologies and technological process to achieve the integration of these MEMS switches in phase shifters and SPDT devices.3) develop gas and pressure sensors and actuators of unprecedented performance that can be integrated with RF components of the same type to perform complex functions such as sensing/actuating combined with wireless transmission of data. Components of this type can improve the energy efficiency of systems by leading to efficient power supplies with intelligent energy control while allowing at the same time an increase of safety and functionality. 3 demonstrators will be fabricated by implementing them in a reconfigurable T/R module, a tunable filter and a reflect array antenna. The consortium possesses the experience to undertake this ambitious task. It is composed of 16 partners originating from 6 European countries.
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