Advanced Resonant Nano Electromechanical SystemS (HARNESS)
Advanced Resonant Nano Electromechanical SystemS
Start date: Jan 1, 2014,
End date: Jun 30, 2017
Resonant nano-electro-mechanical systems (NEMS) have been showing outstanding performance as mass, force, charge and magnetic sensors. However, their predicted ultimate limits of detection are far from being achieved. It is the main purpose of this project to study and analyze the different sources of dissipation and frequency instability that determine the final performance of NEMS devices, to convey specificity to NEMS-based mass sensors and to broaden current fields of applications. This will be tackled using piezoelectric (PZE) transduction due to its high linearity and non-dissipative nature. Three work packages will be pursued, one covering each one of the objectives mentioned above. Devices will be analyzed in vacuum, air and interacting with liquid; and the intent is to optimize the performance in each environment separately and demonstrate the feasibility for commercial applications of some of the fabricated devices.
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