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Advanced TEchnology MOdelling for eXtra-functionality devices (ATEMOX)

Start date: Jul 1, 2010, End date: Nov 30, 2013,

Description Extends the capabilities of TCAD to the modelling of leakage currents and technologies for low-leakage ultra-shallow junctions.Within previous European projects process simulation has been brought to a state which allows in industrial environments a sufficiently accurate simulation of doping profiles in advanced CMOS technolog ...
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