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Developing Multidomain MEMS Models for Educational Purposes (EduMEMS)

Start date: Jul 1, 2011, End date: Jun 30, 2016,

Micro-electro-mechanical systems (MEMS) represents a modern field in engineering with a significant impact on industrial applications. By combining together electrical, mechanical, thermal and optical elements, MEMS revolutionize the market of sensors and actuators. Clearly, each discipline mentioned above is a long-established and thoroughly researched field. However, there are still many MEMS ph ...
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