"MEMS activities at METU have been continuing since 1995 in the framework of a number of national/international projects, including NATO-SfS (TU-MICROSYSTEMS), US NSF, COST, FP6 (AMICOM), and several national projects. During these projects, a wide variety of sensors and devices have been developed, such as pressure sensors, CMOS infrared detectors, accelerometers, gyroscopes, humidity sensors, te ...