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Powerful and Efficient EUV Coherent Light Sources (PECS)

Start date: Nov 1, 2009, End date: Oct 31, 2013,

The interest in and hence the need for coherent short-wavelength (EUV spectral range) laser sources is rapidly increasing. Potentially, such sources will allow for novel approaches in fundamental science, metrology, imaging, spectroscopy and might even enable new lithographic production techniques. One example is Atto-Science, one of the groundbreaking topics in physical science of the next decade ...
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