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Processes for MEMS by inkjet enhanced technologies (PROMINENT)

Start date: Mar 1, 2013, End date: Feb 29, 2016,

Prominent aims to incorporate inkjet printing as a part of the MEMS fabrication process. By using maskless, digitally controlled, localized additive processes instead of the subtractive processes used currently, selected steps in the MEMS manufacturing can be done with simplified process sequence. This will result in • lower initial investment cost for a MEMS line• greatly increased flexibility i ...
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While nanotechnology was originally limited to small areas of a few cm2, the quest for lower costs has been the latest years the drive for developing processes utilising larger substrate sizes at increasing throughputs. A typical example is the flat panel display industry where the push to larger gen size and faster processing has resulted in a significant cost reduction. The next challenge here i ...
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